WaveRunIR™-DRE

Industry’s first mobile, fully automated DRE monitoring system using dual‑FTIR technology for real‑time, EPA‑compliant POU emissions measurement.

The WaveRunIR™-DRE offers a turnkey, software-controlled solution for real-time measurement of Destruction or Removal Efficiency (DRE) of fluorinated greenhouse gases (F-GHGs) at the point of use (POU).

After decades of hands-on experience monitoring emissions inside fabs, the Spectrum team developed the WaveRunIR-DRE to help clients reduce engineering workload, streamline compliance, and capture accurate, real-time gas measurements without affecting production or adding operational overhead.

As the semiconductor industry accelerates toward Net Zero goals, fab operators are seeking more automated, scalable solutions that reduce downtime and support efficient maintenance planning. The WaveRunIR-DRE meets this need by enabling real-time verification of Destruction or Removal Efficiency (DRE) at the point of use (POU), helping facilities align operational efficiency with sustainability initiatives. Integrated with FTIR technology and EPA-compliant calibration protocols, the system continuously tracks inlet and outlet gas flows—enabling verifiable, auditable DRE performance for every compound of interest.

Download Spec Sheet

Key Features

Technical Features

Inlet FTIR – WaveRunIR-EXT 7.5cm
Outlet FTIR – WaveRunIR-EXT 10m
Two micro-PCs with keyboard, monitor, and WiFi
6-inlet, 1-outlet software-controlled gas manifold
Programmable Mass Flow Controllers
Rotameters for visual flow monitoring
Sample filters with pressure gauges for service indication
Onboard SF6 bottle for 3-point tracer gas calibration

Warranty

1-Year Warranty on Materials & Workmanship
5-Year Warranty on IR Source, Laser, and Interferometer

Accessibility

Real-time dashboard with either cloud based data or an internal LAN dashboard
Mobile, rack mounted system ideal for movement around sub-fabs

System Tools

Real-time data dashboard
NuWave™ Spectroscopic Software

Your Path to Net Zero

Semiconductor fabs aiming for Net Zero emissions face growing challenges from fluorinated greenhouse gases (F-GHGs). Download our white paper to learn more about how Spectrum’s analyzers are accelerating fabs’ journies to Net Zero emissions through real-time, multi-point monitoring of sub-fab exhaust laterals—offering actionable insight into POU abatement efficiency, emissions verification, and sustainability strategy execution.

“The Spectrum team’s flare advice has helped us navigate potential costly pitfalls and has given us confidence in our engineering design decisions. and compliance abilities moving forward” – Ken from USA Ethylene Producer

“Spectrum Environmental Solutions has been able to solve an analytical problem with their FTIR/Raman solution. The Spectrum team has been very responsive to any needs that we have including supporting an FTIR/Raman from a company that no longer exists. Spectrum offers great service and reliable online analyzers.” – Jean François Borny, Analytical Service Manager at Lummus Technology.

View Case Studies

“Spectrum provided an FTIR measurements study to assist our engineers in optimizing our process. Their technology allowed us to better visualize our complex process chemistry and assure low environmental impact” – Randy, USA Chemical Sector

“We were very pleased with Spectrum’s performance. Your team did well to pivot and provide us with excellent work” – Samsung

“Christmas came early. The Spectrum 10m FTIR, 2-Color MCT-InSb, iG50 Thermo Electron bench, Polaris source and unmatched ruggedness and reliability. Customer service was above and beyond. Thank You all at Spectrum! Bring on the Turbines. I can’t wait until the 45m makes its debut!” – Jeff Knapp, Analytical Manager at Alliance Source Testing, LLC

Meet Spectrum's WaveRunIR-DRE Experts

Steve Hall

Vice President - Measurements

Alex Bellon

Senior Principal Technical Specialist and Monitoring Program Manager

Sean Springer

Software Developer / Senior Scientist

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WaveRunIR-CPM

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